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Semiconductor ≤ 300mm
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…
Atmospheric Reticle Robot
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…
Atmospheric Reticle Robot
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…
Atmospheric Reticle Robot
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…
Atmospheric Reticle Robot
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…
Atmospheric Reticle Robot
Reticle sizes: ≤300mm wafer Reticle sizes: ≤300mm wafer Axes of motion: 4 (All AC Servo) Axes of motion: 4 (All AC Servo) # of arms: 2 # of arms: 2 End effector grip: N/A End effector grip: N/A Working R range: -184~200mm Working R range: -184~200mm θ axis 4Working range: TH-92~+182° 4Speed: 3.49rad/sec θ axis…