Atmospheric Robots Product Overview
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MODEL SR8221
Semiconductor ≤ 300mm
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
MODEL SR8221
Atmospheric Reticle Robot
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
MODEL SR8221
Atmospheric Reticle Robot
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
Atmospheric Reticle Robot
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
Atmospheric Reticle Robot
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
MODEL SR8221
Atmospheric Reticle Robot
- Reticle sizes: ≤300mm wafer
- Reticle sizes: ≤300mm wafer
- Axes of motion: 4 (All AC Servo)
- Axes of motion: 4 (All AC Servo)
- # of arms: 2
- # of arms: 2
- End effector grip: N/A
- End effector grip: N/A
- Working R range: -184~200mm
- Working R range: -184~200mm
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
- θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec