Atmospheric Reticle Robot

Written on November 29, 2011 by admin in Atmospheric Robots

Reticle sizes: ≤300mm wafer
Reticle sizes: ≤300mm wafer
Axes of motion: 4 (All AC Servo)
Axes of motion: 4 (All AC Servo)
# of arms: 2
# of arms: 2
End effector grip: N/A
End effector grip: N/A
Working R range: -184~200mm
Working R range: -184~200mm
θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec
θ axis
- 4Working range: TH-92~+182°
- 4Speed: 3.49rad/sec

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